去胶机/GeminiPlasma Asher - 产品展示 - 产品介绍 - 上海向盈电子科技有限公司

去胶机/GeminiPlasma Asher

M200PCUFeatures ·SingleChamberSystem .DualUni-Cassetteprocessing ·100mm-200mmWaferProcesses .Variablepowersupply ·PoLooption:13lampsettings .Reliability ·Availability>90% ·MTBF>300

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详细介绍

Gemini Plasma Asher

.Dual Chamber System

.Variable Power Supply

.Dual Uni-Cassette processing

.100mm- 200mm Wafer Processes

·Reliability

·Availability >95%

.MTBF>350 hours

.MTTR <2 hours

·MTBA>200 hours

.User Interface

·Front and read LCD displays

·PC front-end allows process variabledata logging,error message storage.on-line service logs, andwafer tracking